Micro-Flow Based Differential Pressure Sensor

Microbridge Technologies Canada, Inc has developed a micro-air-flow sensor, integrated on-chip with analog CMOS signal conditioning circuitry and with analog adjustability using Rejustors. The thermoanemometer flow sensing principle, combined with a micro-flow channel having very high flowimpedance, allows accurate sensing of low differential pressures. The flow-impedance is pre-defined at the die-level, dramatically relaxing demands on subsequent packaging operations.