This paper describes the various nonlinearities (NL) encountered in Si-based Piezoresistive pressure sensors. The effect of diaphragm thickness and position of the piezoresistors are analyzed, taking anisotropy into account. Also the effect of the oxide/nitride used for isolation between metal and diaphragm is studied from a linearity point of view.
The Indian Space Research Organisation (ISRO) is a division of India's Department of Space. Its work includes the development of satellites, launch vehicles, sounding rockets, and associated ground systems.
Technical Paper
0
0
Download to Print
Add to bookmarks
0 comments
write a comment